Webinar
Mar 22, 2023

Automating TEM metrology

As semiconductor technology advances, demand for TEM samples and high-quality data from those samples continues to increase exponentially with each new process node. Data consistency, reliability and the acceleration of sample throughput are critical to support manufacturing yield improvements and time-to-market. In times when a large volume of data is in demand and skilled resources are stretched, the automation of STEM metrology is key to achieving these critical parameters.

Automated semiconductor metrology webinar

In this on-demand SPARK Webinar, Automating TEM Metrology, we discuss the advanced automation capabilities of the Thermo Scientific Metrios AX TEM. We explore the critical roles that artificial intelligence (AI) and machine learning (ML) play, and we share learnings to help you automate your TEM sample prep processes. We also show the TEM metrology output on gate-all-around structures.

Metrology of a fully etched gate-all-around device
Metrology of a fully etched gate-all-around device
About the speaker:
Michael Strauss

Michael Strauss, Applications Development Engineer, Thermo Fisher Scientific

Michael Strauss has been an Applications Development Engineer at Thermo Fisher Scientific for 15 years. Prior to joining Thermo Fisher Scientific, Michael was a TEM Engineer at Micron Technology for 10 years. Michael received an M.S. degree in Materials Science & Engineering from the University of Tennessee.