Innovative TEM metrology solution on blanket films

Accurate measurements of blanket films for semiconductor applications in advanced logic and memory manufacturing depend heavily on transmission electron microscopy (TEM) metrology, which serves as the benchmark reference data. The main challenge in achieving fully automated TEM metrology on blanket films lies in the absence of distinguishable structures visible in the cross sections of these films, hindering optimized image acquisition.

Learn more about the app note

Please complete the form below to access the appnote.

First Name

Last Name

Organization/Company

Country/Region

State

Organization Type

I would like to:

Speak to a representative

Schedule a demo

Request a quote

Speak to a service representative about our service offerings

Learn more information as a student

Tell us more about your interest timeline: 0–3 months 4–12 months 12+ months

Address 1

Address 2

City

Zip/Postal Code

Business Phone

Comments

Email Permissions

To comply with your preferences, we need to confirm permission to send you communications by email. Personal information provided will be used in accordance with our Privacy Policy.

I would like to receive marketing and promotional emails regarding products and services from Thermo Fisher Scientific.

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Thermo Fisher Scientific has introduced an innovative solution to this challenge by implementing a Smart Automation workflow and utilizing a “notch” type fiducial created by focused ion beam (FIB) milling. This method enables fully automated TEM metrology on blanket films, overcoming the limitations posed by the lack of distinguishable structures.

Download our application note, Fully Automated Blanket Film Imaging with Metrios Smart Automation, to learn how Smart Automation on the Thermo Scientific Metrios (S)TEM offers a cutting-edge solution for measuring blanket films with exceptional accuracy, precision, and repeatability. Discover the ways in which this innovative technology provides seamless full automation, ensuring reliable and consistent results.

Download the App note