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Semiconductor Sample Preparation for TEM and STEM
Sample preparation for TEM and STEM imaging of semiconductor devices.
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Novel semiconductor device fabrication requires highly accurate imaging and failure analysis to produce improved and optimized fabrication workflows. This means advanced (scanning) transmission electron microscopy (TEM and STEM, or (S)TEM) tools have become a critical component in all leading-edge wafer-fabrication processes.
However, TEM imaging and analysis are highly dependent on the quality of the sample. As a result, sample preparation is a crucial task in fabrication facilities and failure analysis labs. The problem is that conventional methods for ultra-thin (S)TEM sample preparation are challenging and time-consuming, requiring hours, if not days of manual operation by experienced users. The wide range of materials now used in device manufacturing, coupled with the need for site-specific information, only further complicates this process.
Thermo Fisher Scientific offers rapid, accurate, and robust sample preparation tools for (S)TEM imaging on advanced semiconductor designs. Our entire suite of sample preparation instruments allows you to reach atomic scale data faster, easier, and with minimal cost-per-sample. Additionally, Thermo Scientific AutoTEM 5 Software supports fully automated in-situ TEM sample preparation using DualBeam systems. This gives users (of any experience level) the ability to obtain fast, reliable, and repeatable results. Click through to the appropriate product pages below for more information.
Sample prepared with AutoTEM 5 Software, which enables 1-click bulk sample preparation.
TEM sample preparation workflow examples
In-situ TEM sample preparation; the sample is ready for final thinning on the grid.
In-situ TEM sample preparation; the sample is ready for final thinning on the grid.
Automated ex-situ TEM sample preparation; the sample is ready for lift out.
Automated ex-situ TEM sample preparation; the sample is ready for lift out.
DualBeam user interface, showing relevant views for the precise placement of the TEM sample using high-resolution imaging.
In-situ TEM sample preparation; the sample is ready for final thinning on the grid.
In-situ TEM sample preparation; the sample is ready for final thinning on the grid.
Automated ex-situ TEM sample preparation; the sample is ready for lift out.
Automated ex-situ TEM sample preparation; the sample is ready for lift out.
DualBeam user interface, showing relevant views for the precise placement of the TEM sample using high-resolution imaging.
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