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Compound semiconductors offer superior properties compared to silicon-based products for devices such as logic, power, photonics, radio frequency, and sensors. While they have the potential to provide significant performance benefits, manufacturing compound semiconductors also presents challenges.
In this application note, we will discuss compound semiconductors, the impact of crystalline defects, and the need for accurate crystalline defect characterization. The application note concludes with an overview of a high-efficiency workflow using Electron Channeling Contrast Imaging (ECCI) to characterize crystalline defects.