Accelerating S/TEM defect analysis and metrology efficiency

On-demand webinar

Duration: 27 minutes.

In this webinar, we explore the implementation of a new interactive workflow driven by machine learning-based "Smart Automation" technology, which accelerates time to S/TEM results on novel semiconductor devices while reducing operator burden. We dive into how an interactive automated approach enhances the flexibility of Smart Automation to better handle your dynamic requests and how it expands the coverage of various sample types, complementing a fully automated workflow.

Viewers will gain practical guidance on the functionalities and benefits of Smart Automation in S/TEM imaging and EDS analysis. This knowledge will empower viewers to leverage “Smart Automation” to accelerate lab efficiency in S/TEM applications.

In this webinar, you will learn about:

• Practical Smart Automation guidance—Understand the operation and benefits of Smart Automation for S/TEM imaging and EDS analysis.
• Enhanced flexibility—Learn the differences between fully automated and interactive workflows, and learn how combining automation with human expertise improves versatility and lab efficiency.
• Managing complex imaging—Gain insights into using interactive automated workflows to manage diverse and complex imaging needs, complementing the benefits of fully automated workflows.