Multi-stream, multi-component UHP Gas Analysis in the Semiconductor Industry
As the semiconductor industry expands, so does the world’s demand for ultra-high purity gases and chemicals. Combining API-MS with advanced electronics and software, our APIX gas analyzers are an innovative and cost-effective system that detects impurities at levels lower than any other technology. Backed by decades of experience, gas analysis has never been more powerful.
The benefits:
- Reliable, fully automatic system for online quality control
- Superior sensitivity with lower detection capability provides gas analysis suitable for the most stringent quality requirements
- Automatic switching and calibration
- Fast online measurement enables immediate response to gas supply upset conditions
- Industry standard communications protocol for plant control and integration
Download our latest application note, Thermo Scientific™ APIX δQ and APIX Quattro Process Mass Spectrometers, to learn more.