Metrios 6 (S)TEM datasheet | Thermo Fisher Scientific

The Thermo Scientific Metrios 6 (S)TEM (scanning transmission electron microscope) is designed to meet the unprecedented demand for high-volume TEM reference metrology data on advanced memory and logic devices. It provides a 20% productivity gain*, optimizes resource utilization, and delivers high-confidence metrology data. Leveraging artificial intelligence, automation, and metrology precision, the Metrios 6 (S)TEM delivers repeatable, consistent data quickly, independent of the tool, the site, and the operator.

Key features

Smart Stage—Automatically executes sample loading, navigation, optimization, and imaging.
Ultra-X EDS detection system—Delivers 2x faster elemental characterization while maintaining sensitive sample integrity.
Constant power lens—Voltage switching enables high system availability in minutes versus hours.
Smart Automation—50x faster model training to generate consistent, reliable, and scalable reference data.
X-CFEG option—High-resolution EELS elemental analysis, high-throughput STEM, and EDS acquisition.

*20% productivity gain is based on typical semiconductor workflows. Actual productivity gain may vary depending on use case.

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