What is angle-resolved XPS?

Analysis of a thin oxide film on a metal at near-normal and near-grazing collection angles could produce spectra with a larger relative intensity of the oxide peak at the near-grazing emission angle.

The information depth for XPS is a few nanometers, depending upon the kinetic energy of the electrons and the material being analyzed. Angle-resolved XPS (ARXPS), however, is a technique that varies the emission angle at which the electrons are collected, thereby enabling electron detection from different depths. ARXPS provides information about the thickness and composition of ultra-thin films. Such measurements are non-destructive, unlike sputter profiling.

Analysis of a thin oxide film on a metal at near-normal and near-grazing collection angles could produce spectra with a larger relative intensity of the oxide peak at the near-grazing emission angle.

Three major reasons why angle-resolved XPS is useful

  • It can be applied to films that are too thin to be analyzed by conventional depth profiling techniques.
  • It can be applied to films that are irretrievably damaged by sputtering (e.g., polymers).
  • It is non-destructive and can provide chemical state information, unlike methods based upon sputtering.

Angle-resolved XPS measurements provide the following information:

  • Ordering of layers in an ultra-thin film.
  • Thickness of layers
  • Distribution of elements and chemical states within the film (depth profile reconstruction).

Angle-resolved XPS data acquisition

Angle-resolved XPS experiments are undertaken in a serial manner, by limiting the angular acceptance of the analyzer and stepping through a range of angles in turn. This is usually undertaken by tilting the sample with respect to the analyzer.

Angle-resolved XPS data is collected using a series of sample tilt angles.
Angle-resolved XPS data is collected using a series of sample tilt angles.

Products

Style Sheet for Instrument Cards Original

Nexsa G2 XPS

  • Micro-focus X-ray sources
  • Unique multi-technique options
  • Dual-mode ion source for monoatomic & cluster ion depth profiling

 Download datasheet

K-Alpha XPS

  • High resolution XPS
  • Fast, efficient, automated workflow
  • Ion source for depth profiling

 Download brochure

ESCALAB QXi XPS

  • High spectral resolution
  • Multi-technique surface analysis
  • Extensive sample preparation and expansion options

 Download brochure

Style Sheet to change H2 style to p with em-h2-header class

Contact us

Style Sheet for Support and Service footer
Style Sheet for Fonts
Style Sheet for Cards

Electron microscopy services for
the materials science

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

Electron microscopy support and resources