Automated STEM-EDS Metrology and Characterization of DRAM Capacitors

Capacitors play an essential role in dynamic random-access memory (DRAM) and logic device applications. Measuring the critical dimension (CD) and compositional distribution of the capacitor structure is becoming more challenging due to the increasing scaling and three-dimensional complexity.

Learn more about the webinar

Register below to view our on-demand webinar:

First Name

Last Name

Organization/Company

Country/Region

State

Organization Type

I would like to:

Speak to a representative

Schedule a demo

Request a quote

Speak to a service representative about our service offerings

Learn more information as a student

Tell us more about your interest timeline: 0–3 months 4–12 months 12+ months

Address 1

Address 2

City

Zip/Postal Code

Business Phone

Comments

Email Permissions

To comply with your preferences, we need to confirm permission to send you communications by email. Personal information provided will be used in accordance with our Privacy Policy.

I would like to receive marketing and promotional emails regarding products and services from Thermo Fisher Scientific.

In this webinar, we present a scanning transmission electron microscopy (STEM) based, energy dispersive X-ray spectroscopy (EDS) metrology method enabled by the Thermo Scientific Metrios 6 (S)TEM and its new Ultra-X EDS detector. The Ultra-X EDS detector provides a 4.45 srad solid angle, delivering at least 2x greater data collection efficiency than the previous generations of detectors. High-quality analytical information and fast EDS data collection is provided through improved sensitivity, efficiency, and throughput capabilities.

We present a study on the interfacial diffusion and distribution of high-k material within DRAM capacitors during STEM-EDS data collection. You'll also discover the effect of the electron beam and its impact on metrology characterization. The webinar conclude with a discussion of strategies to optimize EDS data collection with minimal beam damage, high-throughput, and reproducible metrology.

About the speaker

Karthik Gnanasekaran, TEM Applications Engineer

Dr. Karthik Gnanasekaran is a TEM Application Development Engineer for semiconductor applications at Thermo Fisher Scientific. Prior to joining Thermo Fisher Scientific, Karthik was a researcher at Northwestern University, Evanston, IL, USA, developing in situ TEM and TEM automation methods. Karthik received his Ph.D. in Chemistry from Eindhoven University of Technology, the Netherlands.