c7c8 - Key/Specs/Resources/Appl/Tech/Doc/Contact

Materials characterization

Advanced materials characterization labs require access to the latest techniques and will push analytical tools, including SEMs, to the extremes of their capabilities. Most of these labs are multi-user facilities that accommodate users with varying degrees of experience. Time on the microscope is precious, and excessive time spent on maintenance, alignments, training, or image optimization needs to be avoided.

Apreo 2 Scanning Electron Microscope

The new Thermo Scientific Apreo 2 SEM expands access to high-performance imaging and analytics to all levels of microscopy expertise. With Thermo Scientific ChemiSEM Technology, a unique live elemental imaging capability, compositional information is always available, through the most intuitive interface. Eliminating all the hassle associated with typical EDS implementations, ChemiSEM Technology offers unprecedented time to result and ease of use.

The Apreo 2 SEM poses much smaller demands on users and lab managers with Thermo Scientific SmartAlign Technology, an optics system that aligns itself. Furthermore, the Apreo 2 SEM automates the image fine-tuning process with Thermo Scientific FLASH technology. FLASH Technology executes any necessary corrections to lens centering, the stigmators, and final focus of the image. The combination of these technologies means that users new to electron microscopy can access the high-end performance of the Apreo 2 SEM. Additionally, the Apreo 2 SEM is the only SEM with a 1-nanometer resolution at 10 mm analytical working distance. No longer does long working distance mean poor imaging. With the Apreo 2 SEM, anyone will be able to confidently get great results.

Apreo 2 SEM video teaser

Apreo 2 Scanning Electron Microscope features

High performance, resolution, and contrast

The combination of advanced optics, detection and automation in Apreo 2 makes obtaining high resolution imaging possible even for users new to SEM.

Lithium Ion cathode

Wide range of sample types

Apreo 2 was designed for maximum flexibility. High quality, high resolution imaging is possible regardless of target samples properties. Insulators, beam sensitive or magnetic materials can all be imaged with ease thanks to Apreo 2's unique optics, detection and beam control options.

Live quantitative EDS with ChemiSEM

Elemental information at your fingertips with ChemiSEM, which provides live quantitative elemental mapping for unprecedented time to result and ease of use.

Quick and easy sample loading

Easy access to the stage, a convenient multi-sample holder, and a fast pump down ensures no time is wasted loading samples. An automated routine to insert and remove a pressure limiting aperture (PLA) allows for a seamless switch between high and low vacuum without opening the chamber.

Advanced automation

From optics, to image acquisition, Apreo 2 provides a range of automated features to make imaging time as effective and efficient as possible. Flash Technology automates image fine tuning The unique Undo function permits efficient exploration of imaging conditions Thermo Scientific Maps software automates large area acquisition with up to 4 different simultaneous signals

Performance at long working distance

Apreo 2 is the only SEM that offers high-resolution performance (1nm) and excellent image quality at analytical working distance (10mm). Sample morphology, topography and surface information can all be simultaneously explored while being at a safe distance from the pole piece. Thanks to its high-speed and high-sensitivity in-lens backscattered detector, BSE are still detected even at extremely low beam currents (as low as few pA).


Apreo 2 Scanning Electron Microscope specifications

Style Sheet for Products Table Specifications
 

Apreo 2 S

Apreo 2 C

Resolution

  • 0.9 nm at 1 kV
  • 0.8 nm at 1 kV (beam decel.)
  • 1.0 nm at 1 kV, 10 mm working distance (beam decel.)
  • 0.8 nm at 500 V (beam decel.)
  • 1.2 nm at 200 V (beam decel.)
  • 1.2 nm at 1 kV
  • 1.0 nm at 1 kV (beam decel.)
  • 1.2 nm at 500 V (beam decel.)

Standard detectors

  • ETD, T1, T2, T3, IR-CCD, Nav-Cam+
  • ETD, T1, T2, IR-CCD, Nav-Cam+

PivotBeam

  • Mode for selected area electron channeling (also known as "rocking beam" mode).
  • Not applicable

Optional detectors

  • DBS, LVD, DBS-GAD, STEM 3+, RGB-CLD, EDS, EBSD, WDS, Raman, EBIC, etc.

ChemiSEM Technology (optional)

  • Live quantitative SEM image coloring is available based on energy dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps, and reliable Noran quantification are included.

Landing energy range

  • 20 eV – 30 keV

Stage bias (beam deceleration)

  • -4000 V to +600 V standard with every system

Low vacuum mode

  • Optional: 10 – 500 Pa chamber pressure

Stage

  • 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.

Maximum beam current

  • 50 nA (400 nA configuration also available)

Standard sample holder

  • Multi-purpose holder, uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples and two pre-tilted row-bar holders (38° and 90°) and does not require tools to mount a sample

Chamber

  • 340 mm inside width, 12 ports, three simultaneous EDS detectors possible, two at 180°, coplanar EDS/EBSD orthogonal to the tilt axis of the stage
Style Sheet to change H2 style to p with em-h2-header class
Style Sheet for Komodo Tabs

Resources

Long working distance imaging on palladium nanoparticles on cerium oxide matrix.

Easy nanoparticles imaging at 10 mm working distance.

Highlight contrast that would otherwise go unnoticed

High material contrast and easy platinum nanoparticles imaging at 10 mm working.

This video demonstrates how Apreo's Trinity detection system quickly answers all our questions about a sample. 

On-demand webinar: Introduction to Apreo 2 - Unmatched versatility powered by ChemiSEM Technology

This is an introduction on-demand webinar to be followed by a more extensive overview of the Apreo 2 SEM, its features, functionalities, ChemiSEM technology, and a demonstration of the Apreo 2 in action. Attend this on-demand webinar to:

  • Learn about the latest in analytical UHR-SEM from Thermo Fisher Scientific.
  • Get introduced to the Apreo 2 SEM.

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.

Long working distance imaging on palladium nanoparticles on cerium oxide matrix.

Easy nanoparticles imaging at 10 mm working distance.

Highlight contrast that would otherwise go unnoticed

High material contrast and easy platinum nanoparticles imaging at 10 mm working.

This video demonstrates how Apreo's Trinity detection system quickly answers all our questions about a sample. 

On-demand webinar: Introduction to Apreo 2 - Unmatched versatility powered by ChemiSEM Technology

This is an introduction on-demand webinar to be followed by a more extensive overview of the Apreo 2 SEM, its features, functionalities, ChemiSEM technology, and a demonstration of the Apreo 2 in action. Attend this on-demand webinar to:

  • Learn about the latest in analytical UHR-SEM from Thermo Fisher Scientific.
  • Get introduced to the Apreo 2 SEM.

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.

Applications

Fundamental Materials Research_R&D_Thumb_274x180_144DPI

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

Quality control and failure analysis using electron microscopy

Quality control and failure analysis

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

Semiconductor-RD_1920x1080

Semiconductor research and development

Innovation starts with research and development. Learn more about solutions to help you understand innovative structures and materials at the atomic level.

Semi-Metrology_1920x1080

Semiconductor metrology

Manufacturing today’s complex semiconductors requires exact process controls. Learn more about advanced metrology and analysis solutions to accelerate yield learnings.

Semiconductor Failure Analysis

Semiconductor Failure Analysis

Complex semiconductor device structures result in more places for defects to hide. Learn more about failure analysis solutions to isolate, analyze, and repair defects.

Semi-Materials-Character_1920x1080

Semiconductor materials characterization

Many factors impact yield, performance, and reliability. Learn more about solutions to characterize physical, structural, and chemical properties.

Display Module Failure Analysis

Semiconductor display technology

Display technologies are evolving to improve display quality and light conversion efficiency. Learn how metrology, failure analysis, and characterization solutions provide insights.


Techniques

EDS Analysis with ChemiSEM Technology

Energy dispersive X-ray spectroscopy for materials characterization.

Learn more ›

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Semiconductor Analysis and Imaging

Thermo Fisher Scientific offers scanning electron microscopes for every function of a semiconductor lab, from general imaging tasks to advanced failure analysis techniques requiring precise voltage-contrast measurements.

Learn more ›

EDS Analysis with ChemiSEM Technology

Energy dispersive X-ray spectroscopy for materials characterization.

Learn more ›

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Semiconductor Analysis and Imaging

Thermo Fisher Scientific offers scanning electron microscopes for every function of a semiconductor lab, from general imaging tasks to advanced failure analysis techniques requiring precise voltage-contrast measurements.

Learn more ›


Contact us

Electron microscopy services

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

Learn more ›

Style Sheet for Support and Service footer
Style Sheet for Fonts
Style Sheet for Cards