Semiconductor TEM Fundamentals

Part 2: Elemental Analysis

On-Demand webinar
Duration: 32 minutes

 

Transmission electron microscopy (TEM) elemental analysis has become crucially important for semiconductor technology development, whether it is being applied in research, metrology, or defect analysis applications.

 

Elemental analysis provides detailed information about the composition and structure of materials at the nanoscale, enabling semiconductor manufacturers to optimize their processes and develop new materials with improved performance.

 

In this webinar, we will present examples of such analysis, explain the basic characteristics of energy dispersive X-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS), and we’ll highlight how these methods offer complementary data. Following from their basic characteristics, we will examine how EDS and EELS can be optimized to achieve the best output from each of them.

 

This webinar is part of our ongoing TEM education series and is aimed at those who may already be using TEMs, as well as other industry colleagues who may be new to TEM technology and wish to learn more about the exciting data that TEM can provide.

 

Please register for the on-demand webinar below.


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