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The rapid innovations in advanced 2.5D and 3D packaging, complex interconnect schemes, and higher-performance power devices are creating unprecedented failure localization and analysis challenges. Defective semiconductor devices often show a variation in the local power dissipation, leading to local temperature increases. The Thermo Scientific ELITE System utilizes lock-in IR thermography (LIT) to accurately and efficiently locate these areas of interest and provide non-destructive 3D device insights. The ELITE System’s optics and InSb camera are specifically designed to achieve high localization resolution and sensitivity and solve the most difficult analytical challenges.

LIT, a form of dynamic IR thermography, provides maximum signal-to-noise ratio, increased sensitivity, and higher feature resolution compared to steady-state thermography. It is the ideal solution for the localization and analysis of line shorts, ESD defects, oxide damage, defective transistors, diodes, and device latch-ups. An optional laser scanning microscope enables high-resolution OBIRCH to complement the ELITE System’s thermal analysis capabilities.

The ELITE System is also available in the VX configuration, which provides all the features required for localizing defects in advanced power devices based on Si, SiC, or GaN technologies.

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Key Features

  • Very high sensitivity, InSb camera, and thermal emission optics enable nondestructive, through-package, and stacked die analysis
  • Real-time lock-in measurement
  • Contactless absolute temperature mapping
  • Optical beam-induced resistance change (OBIRCH) option
  • High-voltage power device analysis option (VX)

Specifications

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Lateral resolution

  • Down to 1 μm

Depth resolution

  • Down to 20 μm
Defect types
  • Wide range of shorts (2 mΩ to 2 GΩ), leakage (power dissipation as low as 1 μW), resistive opens

Sample types

  • Board assemblies, modules, packages, full wafers, wafer coupons, die

FOV

  • Max 200 mm x 160 mm; min 0.62 mm x 0.51 mm

DUT stimulation

  • Internal DC power supply; ATE, CA bus, boundary scan tester, system level tester
  • Up to 10 kV capable (requires VX option)

Time to results

  • Minutes to seconds, depending on applied power and sample

*Performance may vary depending on sample and specific setup.

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Resources

The ability to locate a thermal source in 3D makes the ELITE system well-suited for stacked-die analysis.
The ability to locate a thermal source in 3D makes the ELITE system well-suited for stacked-die analysis.
Sensitivity varies with power level
Sensitivity varies with power level.
The ability to locate a thermal source in 3D makes the ELITE system well-suited for stacked-die analysis.
The ability to locate a thermal source in 3D makes the ELITE system well-suited for stacked-die analysis.
Sensitivity varies with power level
Sensitivity varies with power level.

Applications

Semiconductor Device Packaging

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Manufacturing today’s complex semiconductors requires exact process controls. Learn more about advanced metrology and analysis solutions to accelerate yield learnings.

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ESD Semiconductor Qualification

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Novel architectures and materials pose new challenges. Learn how to pinpoint faults and characterize materials, structures, and interfaces.

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Many factors impact yield, performance, and reliability. Learn more about solutions to characterize physical, structural, and chemical properties.


Techniques

Thermal Fault Isolation

Uneven distribution of local power dissipation can cause large, localized increases in temperature, leading to device failure. We offer unique solutions for thermal fault isolation with high-sensitivity lock-in infrared thermography (LIT).

Learn more ›

Thermal Fault Isolation

Uneven distribution of local power dissipation can cause large, localized increases in temperature, leading to device failure. We offer unique solutions for thermal fault isolation with high-sensitivity lock-in infrared thermography (LIT).

Learn more ›

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Contact us

Electron microscopy services for
semiconductors

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

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