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The continued trend of shrinking semiconductor features means that failure analysis is more challenging than ever before. Additionally, more advanced designs and complex 3D architectures result in an increasing number of wiring layers, more complex memory cells and more sensitive gate structures.
Due to this reduction in feature dimensions and increase in structure complexity, device delayering is becoming more and more important in detecting electrical faults (as well as other phenomena that contribute to device failure). While damage-free de-processing of single layers is critical, it can also be too time consuming for various industrial and R&D applications.
Thermo Fisher Scientific offers a unique combination of plasma FIB technology and proprietary Thermo Scientific Dx Chemistries, which enable automated and damage-free delayering of semiconductor devices, including 7/5-nm logic samples and 3D NAND memory devices. Automatic de-processing allows you to access buried information for advanced devices that would otherwise be unattainable.
Thermo Fisher Scientific's unique Plasma FIB delayering process complements the nProber IV and Hyperion II, delivering a robust nanoprobing and transistor characterization workflow. These instruments also provide advanced failure analysis of 3D packages, along with a wide range of other large-area focused-ion-beam (FIB) processing applications. See our product pages for more information.
Performance, power efficiency, area, and cost are driving packaging innovations. Learn how workflows provide fast, precise, and accurate time-to-data.
Innovation starts with research and development. Learn more about solutions to help you understand innovative structures and materials at the atomic level.
Manufacturing today’s complex semiconductors requires exact process controls. Learn more about advanced metrology and analysis solutions to accelerate yield learnings.
Novel architectures and materials pose new challenges. Learn how to pinpoint faults and characterize materials, structures, and interfaces.
Display technologies are evolving to improve display quality and light conversion efficiency. Learn how metrology, failure analysis, and characterization solutions provide insights.
Many factors impact yield, performance, and reliability. Learn more about solutions to characterize physical, structural, and chemical properties.
As semiconductor devices shrink and become more complex, new designs and structures are needed. High-productivity 3D analysis workflows can shorten device development time, maximize yield, and ensure that devices meet the future needs of the industry.
To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.