A new era in fault localization

E-beam probing for advanced logic failure analysis

The Thermo Scientific Meridian EX System offers high resolution, non-contact probing capability for the semiconductor failure analysis market.

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Meridian EX System datasheet

The Thermo Scientific Meridian EX System offers high resolution, non-contact probing capability for the semiconductor failure analysis market. Its unique use of electron beam probing breaks fault localization barriers on advanced logic devices.

 

Key benefits include:

  • Defect localization resolution of <20nm to meet advanced semiconductor roadmap requirements
  • Electron beam probing to access defects obscured by backside power distribution networks
  • Compatibility with Thermo Scientific analytical workflows
  • Timing analysis and at-speed design debug using high-speed electron beam blanking