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Verios 5 XHR Scanning Electron Microscope

The Verios 5 XHR SEM offers subnanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level.

Scanning electron microscopy characterization

  • High resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV.
  • High contrast on sensitive materials with excellent performance down to 20 eV landing energy and high-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.
  • Greatly reduced time to nanoscale information for users with any experience level using the Elstar electron column featuring SmartAlign and FLASH technologies.
  • Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages.
  • Flexibility for accessories with a large chamber.
  • Unattended SEM operation with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface. 


Verios 5 XHR Scanning Electron Microscope features


SmartAlign technology

SmartAlign technology eliminates the need for any user alignments of the electron column, which not only minimizes maintenance, but also increases your productivity.

Innovative electron optics

Including Thermo Scientific’s patented UC+ gun (monochromator), ConstantPower lenses and electrostatic scanning for accurate and stable imaging.

Sub-nanometer resolution

Elstar Schottky monochromated (UC+) FESEM technology and performance with sub-nanometer resolution from 1 to 30 keV.

Consistent measurement results

The Verios is ideally suited to lab-based metrology applications, with the ability to calibrate to a NIST certified standard at high magnification.

Low dose operation and optimal contrast selection

Advanced suite of high-sensitivity, in-column & below-the-lens detectors and signal filtering for low dose operation and optimal contrast selection.

Easy access to beam landing energies

As low as 20 eV with very high resolution for true surface characterization.

Unattended SEM operation

With AutoScript 4 Software, an optional Python-based application programming interface (API).

Large chamber

With a choice of two precise and stable piezo-driven stages.



Specifications

Style Sheet for Products Table Specifications

Electron beam resolution

  • 0.6 nm at 30 kV STEM (optional)
  • 0.6 nm at 2-15 kV
  • 0.7 nm at 1 kV
  • 1.0 nm at 500 V

Standard detectors

ETD, TLD, MD, ICD, beam current measurement, Nav-Cam+, IR-camera

Optional detectors

Optional detectors | EDS, EBSD, RGB cathodoluminescence, Raman, WDS, and more

Stage bias (beam deceleration, optional)

Up to -4000 V, included as standard

Sample cleaning

Integrated plasma cleaner, included as standard

Sample manipulation

Verios 5 UC

  • 5-axis motorized eucentric stage, with XYR axes piezo driven.
  • XY range 150 x 150 mm2, 70° tilt range.
  • Loading through the door.

Verios 5 HP

  • Chamber mounted, ultra-stable 5 axis all piezo motorized stage.
  • XY range 100 x 100 mm2, 70° tilt range.
  • Loading via automated load lock.

 

Chamber

379 mm inside width, 21 ports

Software options

Style Sheet for Komodo Tabs


Resources

Webinar introducing the new Verios 5 XHR SEM

This webinar will present Thermo Scientific technology advances in electron source, electron column, detector and the user interface that enables routine ultra-low voltage SEM imaging and characterization. By watching the webinar, you’ll learn how to:

  • Find out which level of information high-performance SEM is able to provide for nanomaterial samples
  • Understand how different technologies on the Verios 5 work in unison for exceptional low-V performance
  • Discover how user interface automation brings expert results to all users

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.

Webinar introducing the new Verios 5 XHR SEM

This webinar will present Thermo Scientific technology advances in electron source, electron column, detector and the user interface that enables routine ultra-low voltage SEM imaging and characterization. By watching the webinar, you’ll learn how to:

  • Find out which level of information high-performance SEM is able to provide for nanomaterial samples
  • Understand how different technologies on the Verios 5 work in unison for exceptional low-V performance
  • Discover how user interface automation brings expert results to all users

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.


Applications

Fundamental Materials Research_R&D_Thumb_274x180_144DPI

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

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Semiconductor Pathfinding and Research

Advanced electron microscopy, focused ion beam, and associated analytical techniques for identifying viable solutions and design methods for the fabrication of high-performance semiconductor devices.

yield_ramp_metrology_2_thumb_274x180

Yield Ramp and Metrology

We offer advanced analytical capabilities for defect analysis, metrology, and process control, designed to help increase productivity and improve yield across a range of semiconductor applications and devices.

Semiconductor Failure Analysis

Semiconductor Failure Analysis

Increasingly complex semiconductor device structures result in more places for failure-inducing defects to hide. Our next-generation workflows help you localize and characterize subtle electrical issues that affect yield, performance, and reliability.

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Physical and Chemical Characterization

Ongoing consumer demand drives the creation of smaller, faster, and cheaper electronic devices. Their production relies on high-productivity instruments and workflows that image, analyze, and characterize a broad range of semiconductor and display devices.



Techniques

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

SEM Metrology

Scanning electron microscopy provides accurate and reliable metrology data at nanometer scales. Automated ultra-high-resolution SEM metrology enables faster time-to-yield and time-to-market for memory, logic, and data storage applications.

Learn more ›

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

SEM Metrology

Scanning electron microscopy provides accurate and reliable metrology data at nanometer scales. Automated ultra-high-resolution SEM metrology enables faster time-to-yield and time-to-market for memory, logic, and data storage applications.

Learn more ›


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