静電放電検査 | Orion 3 | Thermo Fisher Scientific

The Thermo Scientific Orion3 Electrostatic Discharge Tester is designed to test for potentially destructive effects of ESD, enabling the identification and hardening of protection structures prior to full-scale production. Given the extremely high cost of integrated circuit production, as well as customer demands for precisely timed component delivery schedules, the Orion3 can save substantial costs in terms of time, material and lost opportunity (time-to-market). The high-resolution dual cameras permit easy and rapid discharge pin alignment during the test setup routine. Both the x- and y-axis are displayed simultaneously. The cameras may be left on during the test to monitor the pin alignment. Vacuum hold-down enables device testing regardless of device types and sizes.

The Orion3 is capable of performing FICDM (field induced or air discharge) testing to all popular industry standards. An event detector ensures each discharge occurs as expected, ensuring proper alignment and contact between the device and the system discharge pin. Events are logged and reported upon test completion, providing confirmation of pin discharge, and the indication of non-stressed pins that require retest. Testing can also be performed, using our LI-CCDM contact test method, which both charges and discharges the device through a controlled impedance environment, eliminating testing issues that can be seen when using air discharge methods.

Key Features

Supports all popular test standards

JS-002, JEDEC, ESDA, AEC and LI-CCDM methods.

Ergonomic work process

Bench height test area allows for an ergonomic work process.

High resolution dual cameras

High resolution dual cameras permit easy discharge pin alignment during test plan set-up.

Humidity level control

Environmental monitor within the test area allows control of humidity levels during testing by flooding the area with user supplied dry air or nitrogen.

Event detector

Event detector confirms ESD discharge and reports when a pin is not stressed.

Automatic waveform capture

Automatic waveform capture for calibration or device testing. Stores I_peak and min/max values for each captured waveform.

Adjustable fixture

Device under test (DUT) held in place by an internal vacuum pump; alignment assured via adjustable fixture.

Thermo Scientific Scimitar software platform

Intuitive test set-up and test execution using the Thermo Scientific Scimitar software platform.

Integrated package outline editor

Integrated package outline editor allows creation of any device, including off grid.

Multiple device definition formats

Device definitions can be imported from legacy applications, other Scimitar applications, and in text based (x, y) formats.

Specifications

Style Sheet for Products Table Specifications

Electrical Requirements	120 or 240 VAC, 15A 50/60Hz
Test Voltage Range	±25 to ±2000 V (±1V steps)
Voltage	120 or 240 VAC, 15A
Description	Electrostatic Discharge Tester, Charged device model
Humidity Range	30 to 60% noncondensing (recommended test chamber range is less than 20%)
Item Description	Tester; Charged device model
Motion System	x,y axis - min. step size 0.001 with 0.00025 in. accuracy (x,y axis - min. step size 25.4µm with 6µm accuracy); z axis - vertical travel to 1.5 with 0.00025 in. accuracy (z axis - vertical travel to 38.1mm with 6µm accuracy)
Specifications	Customer Supplied Vacuum: ≥ 16 in. Hg
Details	Dry air / nitrogen: 0.25 scfm @ 60 psi max
Temperature Range	Operating Temperature: +15° to +30°C (+59° to +86°F); Non-operating temperature: +4° to +60°C (+40° to +140°F)
Hertz	50/60 Hz
Unit Size	Each
	English	Metric
Test Area	4 x 4 in.	10.16 x 10.16 cm
Size	26D x 23W x 48H in	66D x 59W x 122H cm
Depth	26 in	66 cm
Height	48 in	122 cm
Width	23 in	59 cm
Weight	300 lb	112 kg