静電放電検査 | Pegasus | Thermo Fisher Scientific

The Thermo Scientific Pegasus ESD Test System is a low parasitic 2-pin tester used to characterize protection structures at wafer, die, or package level. The Pegasus can also be used as part of your device qualification routine, providing supplemental data to the results gathered when using an automated (relay based) high pin count ESD test system. Testing is available to the latest industry standards for Human Body Model (HBM), Machine Model (MM) waveforms, as well as offering a true System Level (150pF/330Ω) IEC like waveform based on the EOS/ESD Association’s Human Metal model (HMM). The system’s pulse source design and pulse source delivery method ensures waveform fidelity directly at the device under test, not only at the generator output. Current waveforms can be automatically captured and analyzed for each ESD event. In addition, Voltage waveforms can be captured and used to determine the turn-on level of protection structures. They can also be used as a means of failure determination, as the voltage waveforms will generally show changes after ESD events.

Key Features

Fully compliant testing

Fully compliant, Human Body Model (HBM) and Machine Model (MM) testing per the latest industry standards.

System level ESD

True system level ESD 150pF/330Ω network (not a 50Ω emulator) available to meet the proposed Human Metal Model (HMM) requirements.

Wafer probes

2 pin connection via wafer probes to any device in a package, die, or wafer.

Failure analysis

Pre- and post-curve trace measurements for comparative failure analysis.

Oscilloscope interface

Oscilloscope interface (GPIB, USB or TCP/IP) with automatic internal attenuation.

Storage

Storage of all waveforms with automatic analysis using the latest industry standards.

ESD waveform generators

Pods (ESD waveform generators) can easily be installed on a prober station.

Supply controls

Bias supply controls for pre- and post-Idd measurements.

Specifications

Style Sheet for Products Table Specifications

Waveforms	HMM - Proposed ESDA HMM; HBM - JEDEC/ESDA JS-001, MIL-STD 883, and AEC Q100-002; MM - ESDA STM5.2, JEDEC JESD22-A115, and AEC Q100-003
ZAP Voltage	+/- 15 V to 12 kV for HMM and HBM and +/- 50 V to 2 kV for MM
ZAP Voltage Resolution	1V
ZAP Voltage Accuracy	1% of set point +/-5 V source performance ZAP
ZAP count/interval range	1 to 9999 count / 0.3 to 10 second intervals
Curve Tracing	Voltage: 0 to 200 V (consult factory for higher voltages) Resolution: 10 mV Voltage Ranges: 200 mV, 2 V, 20 V, 200 V Current: 0 to 1 A Resolution: 100 nA Current Ranges: 1 μA, 10 μA, 100 μA, 1 mA, 10 mA, 100 mA, 1 A Accuracy 0.5% of range Output: 22 W: 21 V @ 1 A to 210 V @ 0.1 A Resistance Detection: 1 ohm to 200 M ohm Measurment Points: 10 to 250
Pass/ Fail Criteria	Relative and Absolute Values
Main Controller Dimension	43.2 cm (17 in) W x 43.2 cm (17 in) D x 13.2 cm (5.2 in) H
Low vacuum mode	16.4 cm (6 in) W x 12.7 cm (5 in) D x 8.9 cm (3.5 in) H
Weight	Controller: 8.4 Kg (18.5 lbs) Pod: 1.4 Kg (3 lbs)
Main Controller Power	100 to 240 VAC, 2 Amp, 50/60 Hz
Temperature Range	Operating Temperature: +15°C to +40°C (+59°F to +104°F) Non-operating temperature: 4°C to +60°C (+40°F to +140°F) Humidity Range: 30-60% non-condensing
Power Requirements	System: 100-240 VAC, 2A, 50/60 Hz Computer and Monitor: 100-240 VAC, 6.5A, 50/60 Hz