Phenom Software | 3D Reconstruction Software | Thermo Fisher Scientific

6420 - Key/Specs/Resources/Doc/Contact

With Thermo Scientific Phenom 3D Reconstruction Software, the Phenom Desktop SEM systems are able to generate three-dimensional images and submicrometer roughness measurements.

3D imaging helps to interpret sample characteristics and makes images understandable for a larger group of users. It is often difficult to identify features such as dents, scratches and burrs with flat, 2D images. Additionally, measuring the average roughness (Ra) and roughness height (Rz) is critical for controlling and understanding production processes. Phenom 3D Reconstruction Software enables you to transform your 2D observations into 3D representations. By using SEM imaging for data collection, a much better resolution can be achieved than with traditional (indirect) methods.

Key Features

3D imaging

3D imaging helps to interpret sample characteristics and makes images understandable for a larger group of users.

Roughness

Phenom 3D Reconstruction Software is available as part of Thermo Scientific Phenom ProSuite Software, which
contains multiple Phenom desktop SEM specific applications.

No stage tilt

With "shape from shading" technology, no stage tilt is required.

Specifications

Style Sheet for Products Table Specifications

Automated 3D	Full 3D
Image creation	2D or 3D with colored height indication Filtered 3D for surface roughness Based on “shape from shading” technology, no stage tilt required Fast reconstruction
Automated roughness measurements	Ra (average roughness) and Rz (roughness height) User defined waviness filtering Up to 10 line measurements
Field of view	2 mm - 10 μm
Resolution	1024 x 1024 pixels
Output	Line profiles, CSV files, 2D/3D view images and Word report
Part of ProSuite Software	Network storage enabled Phenom integrated system