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Thermo Scientific Inspect 3D Software provides a user-friendly solution for alignment of tomographic image series (obtained with transmission electron microscopy or scanning transmission electron microscopy, TEM or STEM) along with energy dispersive X-ray spectroscopy (EDS) maps, producing a 3D reconstruction of the data. Inspect 3D Software also offers basic visualization functionality. All Thermo Scientific TEM, STEM and EDS tomography software are fully compatible with Inspects 3D Software.
Inspect 3D Software begins with a coarse X-Y alignment based on image cross-correlation. Alignment can be further refined with automated bead tracking or patch tracking procedures. Bead tracking traces multiple round particles on the specimen throughout the tilt series, correcting rotation and magnification changes for each image. Patch tracking traces multiple areas of the image throughout the tilt series and then combines the results.
Inspect 3D Software offers two classical algorithms for 3D volume reconstruction: weighted back projection (WBP) and simultaneous iterative reconstruction technique (SIRT). Additionally, Inspect 3D Software offers easy EDS-tomography reconstruction with simultaneous processing of STEM and EDS files, called HAADF-EDS bimodal tomography (HEBT), leading to enhanced elemental reconstruction.
Iterative reconstruction techniques offered with Inspect 3D Software include;
The resulting reconstructed volumes can be directly imported into Thermo Scientific Avizo and Amira Software for further visualization and analysis.
现代工业需求高通量、质量卓越、通过稳健的工艺控制维持平衡。SEM扫描电镜和TEM透射电镜工具结合专用的自动化软件,为过程监控和改进提供了快速、多尺度的信息。